磁场辅助的小型化潘宁离子源点时燃放电特性研究

doi:10.16180/j.cnki.issn1007-7820.2023.05.011

摘要/Abstract

摘要：

潘宁离子源在小型化过程中会遇到点燃电压升高及阴极与阳极间绝缘材料击穿和不稳定放电等问题。为促使潘宁离子源内部结构小型化,文中在恒定电场下,通过增加磁场的方式实现潘宁离子源稳定放电,达到降电压放电,并延长了绝缘材料使用寿命,实现了稳定放电。此外,采用COMSOL Multiphysics 软件对改进后的离子源内部电场、磁场的分布进行仿真,模拟分析电子在不同区域的运动和电离情况,据此建立了基于恒定电场增加磁场的点燃物理模型。该模型与实际的点燃实验进行对比的结果表明,改进后的小型潘宁离子源在电压恒定为0.8 kV时,仅将磁场增强至156.29 mT即可实现小型潘宁离子源稳定放电。

关键词: 潘宁离子源, 点燃电压, 雪崩效应, 汤森放电, 辉光放电, 电离距离, 点燃模型, 仿真

Abstract:

During the miniaturization of Penning ion source, there are some problems such as the increase of ignition voltage, breakdown of insulating material between cathode and anode and unstable discharge. In order to promote the miniaturization of the internal structure of the Penning ion source, the stable discharge of the Penning ion source is achieved by increasing the magnetic field under the constant electric field, the voltage drop discharge is achieved, the service life of the insulating material is extended, and the stable discharge is achieved. In addition, COMSOL Multiphysics software is used to simulate the distribution of electric field and magnetic field inside the improved ion source, and to simulate and analyze the motion and ionization of electrons in different regions. Based on this, a physical model of ignition based on constant electric field and magnetic field is established. The results of comparison between the model and the actual ignition experiment show that the improved small Penning ion source can realize stable discharge only by increasing the magnetic field to 156.29 mT under the condition of constant voltage of 0.8kV.

Key words: Penning ion source, ignitionn voltage, avalanche effect, Townsend discharge, glowing discharge, ionization distance, ignition model, simulation

中图分类号:

TP391.9

张景皓,张轩雄,Christian Wolf,Michael Wick. 磁场辅助的小型化潘宁离子源点时燃放电特性研究[J]. 电子科技, 2023, 36(5): 71-79.

ZHANG Jinghao,ZHANG Xuanxiong,Christian Wolf,Michael Wick. Study on the Characteristics of Ignition Discharge of A Small Penning Ion Source by Increasing Magnetic Field[J]. Electronic Science and Technology, 2023, 36(5): 71-79.

图/表 17

图1

图2

图3

图4

图5

图6

图7

图8

图9

图10

图11

图12

图13

图14

图15

表1

图16

参考文献 19

[1]	Rovey J L, Ruzic B P, Houlahan T J. Simple penning ion source for laboratory research and development applications[J]. Review of Scientific Instruments, 2007, 78(10):1-3.
[2]	Das B K, Shyam A, Das R, et al. Development of hollow anode penning ion source for laboratory application[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2012, 669:19-21. doi: 10.1016/j.nima.2011.12.030
[3]	Wolf B. Handbook of ion sources[M]. London: CRC Press, 1995:35-89.
[4]	Mamedov N V, Gubarev A V, Zverev V I, et al. Magnetic field design for miniature pulse Penning ion source[J]. Plasma Sources Science and Technology, 2020, 29(2):9-24.
[5]	Hooper Jr E B. A review of reflex and penning discharges[J]. Advances in Electronics and Electron Physics, 1970(27):295-343.
[6]	Wang J. Simulation of gas discharge in tube and paschen’s law[J]. Optics and Photonics Journal, 2013, 3(2):313-317. doi: 10.4236/opj.2013.32B073
[7]	Mamedov N V, Maslennikov S P, Presnyakov Y K, et al. Penning ion source discharge modes for pulsed and continuous power supplies[J]. Technical Physics, 2019, 64(9):1290-1297. doi: 10.1134/S1063784219090081
[8]	Schuurman W. Investigation of a low pressure penning discharge[J]. Physica, 1967, 36(1):136-160. doi: 10.1016/0031-8914(67)90086-9
[9]	Mamedov N V, Schitov N N, Lobok M G, et al. The penning discharge experimental study and its simulation[J]. Plasma Physics and Technology, 2016, 3(3):158-162. doi: 10.14311/ppt.2016.3.158
[10]	Surzhikov S T. The two-dimensional structure of the Penning discharge in a cylindrical chamber with axial magnetic field at a pressure of about 1 torr[J]. Technical Physics Letters, 2017, 43(2):169-172. doi: 10.1134/S1063785017020122
[11]	Mamedov N V, Shchitov N N, Kolodko D V, et al. Discharge characteristics of the penning plasma source[J]. Technical Physics, 2018, 63(8):1129-1136. doi: 10.1134/S1063784218080121
[12]	Hirsch E H. On the mechanism of the Penning discharge[J]. British Journal of Applied Physics, 1964, 15(12): 1535-1543. doi: 10.1088/0508-3443/15/12/314
[13]	Yang Z, Dong P, Long J D, et al. The study of discharge characteristic of the cold-cathode negative hydrogen PIG-type ion source[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2012, 68(5):29-34.
[14]	Carlsson J, Kaganovich I, Powis A, et al. Particle-in-cell simulations of anomalous transport in a Penning discharge[J]. Physics of Plasmas, 2018, 25(6):1-12.
[15]	Phelps A V, Petrovic Z L. Cold-cathode discharges and breakdown in argon: Surface and gas phase production of secondary electrons[J]. Plasma Sources Science and Technology, 1999, 8(3):21-44.
[16]	Mamedov N V, Maslennikov S P, Solodovnikov A A, et al. Effect of the magnetic field on the characteristics of a pulsed Penning ion source[J]. Plasma Physics Reports, 2020, 46(2):217-229. doi: 10.1134/S1063780X20020063
[17]	Küchler A. High voltage engineering: Fundamentals-technology-applications[M]. Schweinfurt:Springer, 2017:56-98.
[18]	Chen F F. Introduction to plasma physics[M]. New York: Springer Science & Business Media, 2012:45-98.
[19]	Fathi A, Feghhi S A H, Sadati S M, et al. Magnetic field design for a Penning ion source for a 200 keV electrostatic accelerator[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2017, 85(3):1-6.

p /mbar	B /mT
2.37×10^-4	179.52
3.35×10^-4	176.49
4.52×10^-4	174.98
6.10×10^-4	174.47
7.33×10^-4	172.45
8.31×10^-4	164.37
9.49×10^-4	156.29