[1] |
YANAZAWA H, HOMMA K . Growing Market of MEMS and Technology Development in Process and Tools Specialized to MEMS[C]//Proceedings of the 2017 IEEE Electron Devices Technology and Manufacturing Conference. Piscataway: IEEE, 2017: 143-144.
|
[2] |
LIU Y H, LIU J S, YU B , et al. A Compact Single-cantilever Multicontact RF-MEMS Switch with Enhanced Reliability[J]. IEEE Microwave and Wireless Components Letters, 2018,28(3):191-193.
doi: 10.1109/LMWC.2018.2800523
|
[3] |
GAO S X, HUANG Q A, QIN M . Reliability Optimization of a 3D Packaged Micro-machined Wind Sensor[C]// Proceedings of the 2018 19th International Conference on Electronic Packaging Technology. Piscataway: IEEE, 2018: 1032-1035.
|
[4] |
WU G Q, HAN B B, CHEAM D D , et al. Development of Six-degree-of-freedom Inertial Sensors with an 8-in Advanced MEMS Fabrication Platform[J]. IEEE Transactions on Industrial Electronics, 2019,66(5):3835-3842.
doi: 10.1109/TIE.2018.2851946
|
[5] |
KOSOBUTSKYY P, LOBUR M, SHCHERBOVSKYKH S . Overlap Estimation of Two Normally Distributed Systems Based on Monte-Carlo Simulation[C]//Proceedings of the 2018 14th International Conference on Perspective Technologies and Methods in MEMS Design. Piscataway: IEEE, 2018: 77-80.
|
[6] |
SYED W U, BOJESOMO A, ELFADEL I M . Variation-aware Modelling of Micro-scale Piezoelectric Energy Harvesters[C]//Proceedings of the 2018 IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. Piscataway: IEEE, 2018: 1-4.
|
[7] |
MADINEI H, KHODAPARAST H H, FRISWELL M I , et al. Nonlinear MEMS Piezoelectric Harvesters in the Presence of Geometric and Structural Variabilities[C]//Procedia Engineering: 199. Oxford:Elsevier Ltd, 2017: 3456-3461.
|
[8] |
MIRZAZADEH R, AZAM S E, JANSEN E , et al. Uncertainty Quantification in Polysilicon MEMS through On-chip Testing and Reduced-order Modelling[C]//Proceedings of the 2017 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems. Piscataway: IEEE, 2017: 7926242.
|
[9] |
REN C H, YANG D Q, LI Q . Impact Resistance Performance and Optimal Design of a Sandwich Beam with a Negative Stiffness Core[J]. Journal of Mechanical Science and Technology, 2019,33(7):3147-3159.
doi: 10.1007/s12206-019-0610-9
|
[10] |
WEI J W, CAI G W . A Gradient-based Nested Latin Hypercube DOE for Quadratic Polynomials RSM in FEM Simulation[C]//Proceedings of the 2017 International Conference on Mechanical, System and Control Engineering. Piscataway: IEEE, 2017: 362-366.
|
[11] |
ZHANG Z, WENG T W, DANIEL L . Big-data Tensor Recovery for High-dimensional Uncertainty Quantification of Process Variations[J]. IEEE Transactions on Components, Packaging and Manufacturing Technology, 2017,7(5):687-697.
doi: 10.1109/TCPMT.2016.2628703
|
[12] |
KOLIS P, BAJAJ A K, KOSLOWSKI M . Quantification of Uncertainty in Creep Failure of RF-MEMS Switches[J]. Journal of Microelectromechanical Systems, 2017,26(1):283-294.
doi: 10.1109/JMEMS.2016.2636841
|
[13] |
GENNAT M, MEINIG M, SHAPORIN A , et al. Determination of Parameters with Uncertainties for Quality Control in MEMS Fabrication[J]. Journal of Microelectromechanical Systems, 2013,22(3):613-624.
doi: 10.1109/JMEMS.2012.2236076
|
[14] |
CIRIC T, MARINKOVIC Z, PRONIC-RANCIC O , et al. ANN Approach for Analysis of Actuation Voltage Behavior of RF MEMS Capacitive Switches[C]//Proceedings of the 2015 12th International Conference on Telecommunication in Modern Satellite, Cable and Broadcasting Services. Piscataway: IEEE, 2015: 381-384.
|
[15] |
CIRIC T, MARINKOVIC Z, PRONIC-RANCIC O , et al. Modeling of Actuation Voltage of RF MEMS Capacitive Switches Based on RBF ANNs[C]//Proceedings of the 2016 13th Symposium on Neural Networks and Applications. Piscataway: IEEE, 2016: 7800133.
|
[16] |
AK C, YILDIZ A, AKDAĞLI A , et al. Computing the Pull-in Voltage of Fixed-fixed Micro-actuators by Artificial Neural Network[J]. Microsystem Technologies, 2017,23(8):3537-3546.
doi: 10.1007/s00542-016-3128-4
|
[17] |
KIM T, MARINKOVIC Z, MARKOVIC V , et al. Efficient Modelling of an RF MEMS Capacitive Shunt Switch with Artificial Neural Networks[C]//Proceedings of the 2013 International Symposium on Electromagnetic Theory. Washington: IEEE Computer Society, 2013: 550-553.
|
[18] |
Ć MILIJIC M, MARINKOVIĆ Z, KIM T , et al. Modeling and Optimization of Ohmic Series RF MEMS Switches by Using Neural Networks[C]//2014 German Microwave Conference. Berlin: VDE, 2014: 1-4.
|
[19] |
SUTAGUNDAR M, NIROSHA H, SHEEPARAMATTI B G . Artificial Neural Network Modeling of MEMS Cantilever Resonator Using Levenberg Marquardt Algorithm[C]//Proceedings of the 2016 2nd International Conference on Applied and Theoretical Computing and Communication Technology. Piscataway: IEEE, 2016: 808-811.
|
[20] |
XU C T, LI M, ZHAO S , et al. Fast and Accurate Prediction of Spurious Modes in Aluminum Nitride MEMS Resonators Using Artificial Neural Network Algorithm[C]//Proceedings of the 2017 IEEE International Ultrasonics Symposium. Washington: IEEE Computer Society, 2017: 8092497.
|