低压大位移静电微驱动器驱动机理分析

doi:10.3969/j.issn.1001-2400.2014.02.014

J4 ›› 2014, Vol. 41 ›› Issue (2): 85-89.doi: 10.3969/j.issn.1001-2400.2014.02.014

低压大位移静电微驱动器驱动机理分析

田文超;陈志强;贾建援

(西安电子科技大学机电工程学院，陕西西安 710071)

收稿日期:2012-12-11 出版日期:2014-04-20 发布日期:2014-05-30
通讯作者: 田文超
作者简介:田文超(1968-)，男，教授， E-mail: tianwenchao@21cn.com．
基金资助:
国家自然科学基金资助项目(61176130)

Analysis of the driving mechanism of the large-displacement low-voltage electrostatic micro-actuator based on the principle of vertical-horizontal bending

TIAN Wenchao;CHEN Zhiqiang;JIA Jianyuan

(School of Mechano-electronic Engineering, Xidian Univ., Xi'an 710071， China)

Received:2012-12-11 Online:2014-04-20 Published:2014-05-30
Contact: TIAN Wenchao

摘要/Abstract

摘要：

针对微电子机械系统领域中横向加载单向变形静电微驱动器存在位移过小或驱动电压过大的问题，提出一种纵横弯曲硅基大位移低电压静电微驱动器．分析了静电调节力、温度应力和挤压力对微梁变形的影响．基于纵横弯曲理论，推导出位移放大系数δ．仿真结果发现，纵横弯曲微驱动器的驱动机理实质是通过位移放大系数δ，放大单向加载横向驱动器变形量，从而实现大位移、低电压驱动目的；5V驱动电压可实现高达17.5μm的位移，远大于目前传统横向加载单向变形微驱动器的变形量．

关键词: 微驱动器, 纵横弯曲, 放大系数, 微电子机械系统

Abstract:

In the Micro Electro-Mechanical System (MEMS) field, the traditional electrostatic micro actuator of transverse loading and unidirectional deformation is faces problems of the oversized voltage and undersized displacement. An electrostatic silicon micro actuator featuring large-displacement and low-voltage is presented. Displacement amplification coefficient δ is derived based on the principle of vertically-horizontally bending. Simulation results show that the drive mechanism of the vertically-horizontally bending micro actuator is to amplify the deformation of unidirectional transverse loading by the displacement amplification coefficient δ. The purpose of large-displacement at low-driving voltage is realized. The effects of electrostatic adjustment force, temperature stress and extruding force on micro beam deformation are analyzed, respectively. Simulation shows that when the driving voltage is 5V, the output displacement is as high as 17.5μm. The deformation is much larger than that of the traditional micro actuator of transverse loading and unidirectional deformation.

Key words: micro actuator, vertically-horizontally bending, amplification coefficient, micro electro-mechanical system(MEMS)

田文超;陈志强;贾建援. 低压大位移静电微驱动器驱动机理分析[J]. J4, 2014, 41(2): 85-89.

TIAN Wenchao;CHEN Zhiqiang;JIA Jianyuan. Analysis of the driving mechanism of the large-displacement low-voltage electrostatic micro-actuator based on the principle of vertical-horizontal bending[J]. J4, 2014, 41(2): 85-89.

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低压大位移静电微驱动器驱动机理分析

Analysis of the driving mechanism of the large-displacement low-voltage electrostatic micro-actuator based on the principle of vertical-horizontal bending

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