低压大位移静电微驱动器驱动机理分析

doi:10.3969/j.issn.1001-2400.2014.02.014

J4 ›› 2014, Vol. 41 ›› Issue (2): 85-89.doi: 10.3969/j.issn.1001-2400.2014.02.014

• Original Articles • Previous Articles Next Articles

Analysis of the driving mechanism of the large-displacement low-voltage electrostatic micro-actuator based on the principle of vertical-horizontal bending

TIAN Wenchao;CHEN Zhiqiang;JIA Jianyuan

(School of Mechano-electronic Engineering, Xidian Univ., Xi'an 710071， China)

Received:2012-12-11 Online:2014-04-20 Published:2014-05-30
Contact: TIAN Wenchao E-mail:tianwenchao@21cn.com

Abstract

Abstract:

In the Micro Electro-Mechanical System (MEMS) field, the traditional electrostatic micro actuator of transverse loading and unidirectional deformation is faces problems of the oversized voltage and undersized displacement. An electrostatic silicon micro actuator featuring large-displacement and low-voltage is presented. Displacement amplification coefficient δ is derived based on the principle of vertically-horizontally bending. Simulation results show that the drive mechanism of the vertically-horizontally bending micro actuator is to amplify the deformation of unidirectional transverse loading by the displacement amplification coefficient δ. The purpose of large-displacement at low-driving voltage is realized. The effects of electrostatic adjustment force, temperature stress and extruding force on micro beam deformation are analyzed, respectively. Simulation shows that when the driving voltage is 5V, the output displacement is as high as 17.5μm. The deformation is much larger than that of the traditional micro actuator of transverse loading and unidirectional deformation.

Key words: micro actuator, vertically-horizontally bending, amplification coefficient, micro electro-mechanical system(MEMS)

TIAN Wenchao;CHEN Zhiqiang;JIA Jianyuan. Analysis of the driving mechanism of the large-displacement low-voltage electrostatic micro-actuator based on the principle of vertical-horizontal bending[J].J4, 2014, 41(2): 85-89.

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Analysis of the driving mechanism of the large-displacement low-voltage electrostatic micro-actuator based on the principle of vertical-horizontal bending

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